Wafer holder for ion implantation



FIG. 1 is a front view of a wafer holder for ion implantation, which isan apparatus used in the manufacture of integrated circuits,specifically used to fix the wafer to an ion implantation device toperform the process of ion implantation into the wafer by ion beam,showing my new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a perspective view thereof;

FIG. 8 is an enlarged cross sectional view taken along line 8-8 of FIG.3 thereof;

FIG. 9 is an enlarged cross sectional view taken along line 9-9 of FIG.3 thereof;

FIG. 10 is a bottom perspective view of the arm thereof, wherein the armis shown removed for ease of illustration; and,

FIG. 11 is an enlarged perspective view of a portion taken along line11-11 of FIG. 10 thereof.

The broken lines shown in the drawings represent portions of the waferholder for ion implantation that form no part of the claimed design.

CLAIM The ornamental design for a wafer holder for ion implantation, asshown and described.